Do you have a chance to use simple electrical resistive heat element (“boat” or filament) evaporation instead of E-beam? What is the base pressure you achieve prior to evaporation?
Thank you everyone for the suggestions. We figured out the adhesion problem. It was due to the type of tape we used as a mask. The glue from the tape apparently leaked underneath the deposited film and led to rapid delamination in certain areas after exposure to ethanol, acetone, or even water.