The fluoride ion can be introduced either by using hydrofluoric acid or by adding the ion in the form of a salt (e.g., ammonium and sodium fluoride salts).
Often, hydrofluoric acid ― when used as etchant ― can be substituted by Buffered Hydrofluoric Acid (BHF) or Buffered Oxide Etch (BOE) (*), which often contains NH4F and HF aq.; by NH4HF2 (or KHF2) + HCl conc. aq.; or by hexafluorosilicic acid (fluosilic acid).