Hi, I'm a graduate student in South Korea. I have a question about SU-8 photoresist(KAYAKU). I found that a paper described SU-8 as a UV-curable epoxy. Based on the lack technical knowledge of a master's student, I thought that I don't need to do HMDS treatment while we fabricate SU-8 pattern on Si Wafer since epoxy is hydrophilic material. Also, I had a confidence since I failed to coat SU-8 on wafer after treated it with HMDS. Without HMDS, it was successful.
However, after I found that the manual of KAYAKU described SU-8 as a hydrophobic photoresist, I'm so curious that WHY SU-8 CAN BE COATED WITHOUT HMDS TREATMENT in sight of materials.
SU-8 photoresist is naturally hydrophobic, so HMDS treatment is often unnecessary for coating on Si wafers. Its successful coating without HMDS is because SU-8 already has good adhesion due to its inherent hydrophobic surface properties.
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