I use the GSAS program package with function 4 to Adjust the XRD pattern of the powder samples by Rietveld method. This funtion allows to obtain the mean crystallite size, microstrain and phase fraction, but I dont know if there is physical meaning to do the same procedure to X-ray diffraction grazing angle of the thin films.What is the best method to determine the microstrains and phase fraction for thin films samples?
Are your thin films epitaxial (single crystalline) or polycrystalline ?
I am not an expert in GSAS software but have used it to analyze target that is used for PLD. I was also keen to study weather the film can be analyzed by GASA but i think that then in this case, we need to know a lot of parameters before hand such as in-plane strain out of plane strain etc ..
i think that if u are getting some peaks by GIXRD, then you films are polycrystalline so perhaps GSAS can give u a good approximation of what phase fractions there are in the films, not sure about the strain though
THIS MIGHT HELP
http://www.icdd.com/resources/axa/vol53/V53_14.pdf
http://xray.cz/mstruct/
Thank Dr. Paritosh Vadekar,
The films are polycrystalline. I agree with you that GSAs should not be the most appropriate to apply in the Rietveld analysis of the films and I think this idea is common to the community.
I'll read the article carefully, but from what I understand, the authors propose a new program for structural characterization which also includes this analisys for films, is that right?
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