Hi, I am working on the home-made ALD system at college. I am looking for an insulating material with high-temperature resistance for vacuum operation. We plan to use the stepper motor to rotate the heating plate. The problem is that most stepper motors have around 100~150C as maximum operating temperature. Our working temperature is around a maximum 400C. Some of the vacuum stepper motors have a relatively higher maximum working temperature, however, the price is more than $2k. Therefore, I decided to place insulating material below the heater so that the motor could work under maximum working temperature. I was thinking about Teflon or Bakelite as insulating material, but it couldn't meet the our working temperature. I was thinking about simply place a glass under the heater since the glass price is cheap. However, we need to hold the heating plate with insulating material, and the glass is pretty much limited to apply bolts and nuts since it is fragile.
I wonder if you folks have any recommendations.
Considering factors
1. Market Price: Maximum several hundred dollars is desirable (Size: 4" OD, the thickness depends on thermal conductivity)
2. Temperature resistance: up to 400C (For example, polymers which have melting or glass temperature higher than 400C, or any fiber included materials which can handle 400C)
3. Insulating material: Low thermal conductivity.(I know it is vague. thickness is also a limited factor. We are looking to find the insulating material which has less than 3 inch)