We are using DEZ (Diethyl-Zinc) and TEMAHf (Tetrakis Ethyl Methyl Amino Hafnium) as precursors. A usual ALD cycle is:
DEZ/PURGE/DI H2O/PURGE/TEMAHf/PURGE/DI H2O/PURGE
What happens if we don't use the DI H2O pulse after DEZ and subsequently TEMAHf as:
DEZ/PURGE/TEMAHf/PURGE/DI H2O/PURGE
Would there be any change in the Hf doping in ZnO lattice? What properties we could expect?