26 December 2024 0 5K Report

We are using DEZ (Diethyl-Zinc) and TEMAHf (Tetrakis Ethyl Methyl Amino Hafnium) as precursors. A usual ALD cycle is:

DEZ/PURGE/DI H2O/PURGE/TEMAHf/PURGE/DI H2O/PURGE

What happens if we don't use the DI H2O pulse after DEZ and subsequently TEMAHf as:

DEZ/PURGE/TEMAHf/PURGE/DI H2O/PURGE

Would there be any change in the Hf doping in ZnO lattice? What properties we could expect?

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