In Atomic Layer Deposition (ALD), what will happen if we don't give a DI H2O (oxidiser) pulse in between two metal precursor pulses?

We are using DEZ (Diethyl-Zinc) and TEMAHf (Tetrakis Ethyl Methyl Amino Hafnium) as precursors. A usual ALD cycle is: DEZ/PURGE/DI H2O/PURGE/TEMAHf/PURGE/DI H2O/PURGE What happens if we don't use...

26 December 2024 4,617 0 View