In an RF sputtering system, how do I change the substrate bias voltage?

Vinayak Shrote @Vinayak-Shrote-2

08 April 2023 1 10K Report

K. Sreenivas

Pl ensure your question is on substrate bias voltage, and not self-bias voltage on a target

If it is substrate bias voltage, then it will be nice to know......

What is your present substrate bias voltage in (volts), is it DC or RF ?

Do you have any meter which is indicating this voltage

and how is it being applied.

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