FESEM picture can be used to illustrate grain size, surface morphology. However, if you want more detailed information about surface morphology, AFM is needed. AFM can be used to get quantitative data on surface roughness in the Z-axis and in lateral dimension. You can also do Power spectral density(PSD) analysis from the AFM image. For TEM, it will give you more information in local area in nanoscale, like defect or dislocations on your thin film. If you are growing heterostructure, cross-section TEM is a good way to illustrate the growth along interface. Hope these information helps.

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