I need wet chemical etchant recipe for sputtered Silicon. I 'd like to etch 300nm deep structures. Ideas? Recipes?

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T S Guruprasad

U can use tmah, it etches silicon with a faster etch rate.

Irina Stateikina

TMAH 25% - use lower temperature in order to obtain better ER control.

Follow up question - is our sputtered Si amorphous, or polycrystalline?

One more thing - the resist as a masking material will not work in this case you would need to have an oxide mask in order to use TMAH

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HNO3 (69%) : H2O : NH4F (40%):: 64% : 33% : 3% :: 189 ml : 96 ml : 7.5 ml