As Son said the SEM is the technique to see the surface microstructure ( shape and size of particle) of your sample. If SEM is attached with EDAX you can also see the elements present in your sample.
SEM image could be used for determining size and shape (Micro Structure) of the micro indentation achieved by using EDM. In fact using SEM one could also look for any unexpected aberrations in the shape of micro indentation occurred via drilling process. Besides, as mentioned by others in the thread an SEM equipped with EDS does provide a qualitative insight into composition (at least 10% error) of the materials being probed. From compositional analysis one could determine impurity levels etc.