You may refer to the motif analysis method endorsed by ISO specification standards. Motif analysis allows to characterize the morphology by extracting the significant patterns then computing some ad-hoc standard areal surface characterization parameters. Please follow the link embedded in the attached file for a direct access to a related paper by Blunt et al.
Moreover, in order to help you segment your SEM images, I suggest you use the MorphoLibJ plugin from ImageJ. Follow: https://imagej.net/MorphoLibJ
Finally, even if you do not have multiple images of the same sample from different viewpoints (stereophotogrammetry) or under different illumination conditions (stereophotometry), it may be interesting to perform first an approximate (i.e. not metric) 3D reconstruction from a single image (Shape From Shading -SfS- approach) in order to improve the pattern extraction by segmentation. Follow:
Jones et al., " Automated Interpretation of SEM Images ", 1995 - http://citeseerx.ist.psu.edu/viewdoc/download;jsessionid=BF30166B4BE919BBD4534933F2A397C9?doi=10.1.1.17.7670&rep=rep1&type=pdf
Chang et al., " Shape from shading using graph cuts ", 2008 - http://www.wisdom.weizmann.ac.il/~vision/courses/2010_2/papers/ShapeFromShading_PR.pdf
A prior 3D reconstruction based on SfS is all the more justified as the illumination model of SEM is approximately Lambertian.