I tried to transfer monolayer WSe2 from sapphire substrates to PDMS, but I failed. The transfer process is very normal. First, coat WSe2 which is on sapphire with a thin film of PMMA by spin coating. Second, put the sample into BOE(buffer oxide enchant) to weaken the van der Waals force between WSe2 and sapphire. Third, peel the PMMA-WSe2 film and transfer it onto PDMS. Finally, remove PMMA by acetone. The first three steps are all no problem, but when the sample was dipped into acetone to remove PMMA, I found that the surface of PDMS was damaged, and also, WSe2 seemed to be damaged by the deformation of PDMS. Is there any other good method to transfer WSe2 from sapphire to PDMS, or is there any other solvent to remove PMMA? Thank you!

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