Guys, I'm having some problems with the MoS2 sample transfer. I used magnetron sputtering titanium(1nm)/gold-assisted(7.5nm) mechanical exfoliating of MoS2 from the bulk MoS2 to get the monolayer MoS2 I wanted. This is a reference DOI:https://doi.org/10.1021/acsnano.8b06101

However, when I spin coating PMMA on the surface of the Si/SiO2/Ti/Au/MoS2 sample, I get Si/SiO2/Ti/Au/MoS2/PMMA sample. Then I use Au etchant to etch gold to get MoS2/PMMA. Unfortunately, I have found that MoS2/PMMA and Si/SiO2/Ti/Au fail to delaminate even after a long time. I didn't know that there was a problem in that process. If any friends know, could you please tell me? I would be very grateful.

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