Hello everyone,
How do you test the bonding strength for PDMS bonded to silicon/glass? Which method and which tools do you use? Which is the resolution of your method?
Thank you for your help!!
Valerio
I am familiar with the "razor blade" method.
Basically you insert a razor blade into the bonding interface (not sure if this is feasible with PDMS - if the PDMS is too soft you'll just cut it). The razor blade causes the two films (eg. wafer & PDMS film) to separate. In front of the razor blade, there will be some distance that has delaminated - the delaminated distance in front of the razor blade can tell you the bond strength.
See this surprisingly useful wikipedia page on the technique:
https://en.wikipedia.org/wiki/Wafer_bond_characterization#Double_cantilever_beam_.28DCB.29_test
Schematic of the technique: https://en.wikipedia.org/wiki/Wafer_bond_characterization#/media/File:A-dcb1.png
Dear Demis,
Thank you very much for your answer. By the way I am pretty sure that a razor blade would cut the PDMS. But the other methods described in the link you sent me seem promising. Thank you!!
A sealed PDMS test chambers bonded to different substrates were supplied pressurized air from a cylinder. A pressure control and measurement device was employed to measure the pressure. Air pressure was very slowly increased until bond failed.
see the paper: http://iopscience.iop.org/article/10.1088/0960-1317/20/6/064020/meta
Also, If the surface roughness increases further there is a fall in the bond strength for glass-PDMS bond.
See the: https://pdfs.semanticscholar.org/15b6/ae590080d64a5254f2c9aa9072853a7b1380.pdf
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