Hello researchers, I have recently been involved in simulating doping of Si using Silvaco Athena, and I have encountered an issue with selecting germanium (Ge) as the dopant. While I can choose Ge as a dopant in the Command, no matter how I change the parameters such as temperature, time, and dopant concentration, the resulting .str file does not contain any Ge elements and still retains the original state of the Si substrate. Similarly, when I use Ge as a substrate and attempt to dope it with Al, In, or Ga, I cannot obtain the correct results. I have tried other elements, and the issue did not occur. Is there an issue with Silvaco's support for Ge? Has anyone encountered a similar problem, and if so, how can it be resolved?
code is simple:
go athena
line x loc=0 spac=0.01
line x loc=0.1 spac=0.01
line y loc=0.00 spac=0.001
line y loc=1 spac=0.001
#
#diffus time=4 hours temp=900 nitro c.germanium=1e15
#
init silicon phosphor resistivity=5 orientation=100
# anneal 4 hours with Ge dopants
method fermi
diffus time=4 hours temp=900 nitro c.germanium=1e19
structure outfile = Ge_doping_h.str
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