This info is never easy to find unless you already have access to the technology from a foundry. You may try to find good-enough approximations from predictive technologies, ITRS roadmaps, and some specific publications.

Agreeing with Samuel,

The vertical cross section structure is the matter of technology in addition to the minimum feature size which is the minimum channel length of the transistor.

In digital design you choose your transistor as a minimum area transistor which is given in the technology file obtained from the factory. Only as a design parameters you can determine W/L the width to length ratio, where w is the transistor width and L is the transistor length. There is also the layout rules which you must follow to determine such minimum area transistor.

i agree with Habib that you refer to a good book on the VLSI design.

Best wishes