I am trying to obtain Ru 3d XPS spectra of samples with RuO2 content of 0.1 ~ 0.3%. But due to the overlapping of the C 1s region and maybe the low content as well, the Ru 3d5/2 peak was almost not detectable and not good for analysis. Does anybody know how to obtain Ru 3d5/2 peak with better quality? I attached a picture of my spectra with the Ru 3d5/2 region which was only able to be seen after a 10 times magnification.

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