To measure the thickness of solution gel processed Al2O3 on a glass substrate, you can use techniques such as Scanning Electron Microscopy (SEM) for cross-sectional analysis, Surface Profilometry for height profiling, or Ellipsometry for optical measurements. Each method provides accurate thickness determination suitable for thin films.

By profilometer we need to have a step right.

Abhiilash Vicky

You can get film thickness from X-Ray Reflectometry. Check This

https://www.researchgate.net/profile/K-Sreenivas/post/How_might_I_measure_ultra_thin_film_thickness_with_X-ray_Reflectivity/attachment/59d64121c49f478072eaaaf5/AS%3A273794281738240%401442289052593/download/www-xray-eng.pdf