Hello Everyone,
I have deposited solution-processed RuOx thin film on flexible PET substrates. In order to measure the thickness of the RuOx thin film,can we use an ellipsometer for thickness measurement? If not, then what would be the alternative approach?
I usually do a series of samples with different deposition time to calibrate the target. The thickness measure can be done in many ways, usually i would use grazing Xray since you can also get the film roughness but if Xray is not available you can measure it by MEV,AFM or by Stylus Profilers.
Basically any technique that can measure a step is valid you just need a film thick enough for the available method.
Thanks a lot, Jose, for your reply. I am going to use stylus profilers to measure the thickness due to their availability.I hope to get a significant result.
You can try quartz to control the films https://www.mtixtl.com/Film-thickness-controller.aspx
Dear Kanishk,
I would go as simple as possible and use direct methods. If thikness of the oxide allows (few um) - simply use a handheld micrometer. If it's thinner - make a nice edge (freeze it with liquid nitrogen, break the foil) and do SEM of the cross section.
Best regards,
Ievgen
Usually I need to prepare mask for step from sustrate to the film edge. If you can deposit simultaneously on different substrates as PET as glass you can realize step for further using the profilometer on glass substrate without PET.Mask was made by the same material such as a piece of glass that you can put directly on the surface of substrate.
The ideal measurement method will depend on the range of thicknesses expected: stylus-type measurements, XRD and SEM for thick films (µm scale); SE, AFM and TEM for really thin films (nm-scale). For reference you want a piece of uncoated substrate. If you use a thin, flat metal foil as cover that you can retract successively then you can deposit 5 or 6 layers of different thicknesses (start with the thickest) all in one go and so calibrate your deposition rate.
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