I want to measure sidewall roughness
How to measure sidewall roughness?
Thank you
Typical roughness testers can be used. CMM device is also used, as given in the file.
Typically by AFM in Nanotechnology. Follow:
depends what sample you are considering. We often evaluate sidewall roughness in deep trench (DRIE process by doing cleave and SEM
Surface roughness, several options I can think of: Optical of mecanical (Sylus)
https://www.keyence.com/landing/microscope/lp_vk250_micro.jsp?aw=google-kaenVK137130ee&gclid=CK3SldaJ29ICFYMkgQod18kB6w
http://www.filmetrics.com/opticalprofilers/profilm3d-for-roughness
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