The kinetic energy of neutral atoms is around 2 eV. These neutral atoms are from ion irradiation surface (ion sputtering). There are some techniques like microbalance, TOF-position spectrometer, LIF as well as Rutherford backscattering etc. Are there any new techniques to do this measurement?
As far as I know, alkali metals show preferential sputtering as ions rather than neutrals...If that is your case, ion detection is far easier than neutral, Faraday cups are suitable for that. The angular distribution of the neutral counterpart (30%) should mirror that of ions...I think diffusion at 10-10 mbar is not an issue...just line of sight ejection.
Thanks for your reply Francisco L Tabares
Could you send more explanations (some experimental papers) about alkali metals sputtering as ion preferentially please? Does it hold for sputtering some silicate sample with alkali metal ? Also you mentioned that the neutral counterpart 30%, how do you get that ?
I was referring to alkali as the target, not the projectile...here is one reference
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