I want to put few oxygen into a UHV chamber at a pressure of 10-10mbar,and that may reduce the pressure to 10-8 mbar.
Are you working in such an environment to introduce gas at low pressure?
Use a gas tube inlet (for UHV connection, strong stainless steel should be used) with a pressure gauge and a control valve to connect your chamber. You may need to ask the mechanical workshop to help you.
If you have a heating option inside the chamber, you may use thermal decomposition of lithium perchlorate. At 400C it decomposes to LiCl and O2 (60 weight % is converted to O2).
LiClO4 → LiCl + 2O2
Sodium chlorate decomposes at ~600C (22.5 weight % O2 )
2 NaClO3 → 2 NaCl + 3O2
The standard technique for e.g. adsorption experiments but also for growth at elevated pressure is backfilling the chamber via a precision leak valve. The leak valve is connected to a gas manifold which is, before filling with O2, pumped to pressures below the residual contaminants in your gas. The pressure in the chamber is controlled by your BA gauge. Cleanliness of the admitted gas may be checked by a mass spec.
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