Piranha solution or plasma treatment can help.

Hi Sergey A. Shvetsov

Glad to hear you! Plasma or UV-Ozone methods are effective, but our current instruments cannot accommodate large-sized glass. That’s why I considered using surfactants to improve wetting. I understand this is the approach the industry is exploring, but I prefer to avoid pre-treating the glass with strong acids or basis, as they could make it more fragile. Do you have some other idea?

@Yan-Song Zhang, nice to hear you too)) I've sent you private message.

You could use base to clean glass, then HMDS, hexamethyldisilazane (in exhaust hood) to make hydrophobic and increase adhesion. This is done in electronics industry. You can look for info from FPD, Flat panel display, photomask industries for example or silanization company suppliers.

What is your substrate size?

Which kind of glass are you dealing with?