Can anybody suggest a suitable technique to obtain a free-standing ITO which can be later stacked on to another thin film. Basically I need to deposit ITO without damaging the existing layer.
You may find the following article interesting; maybe a similar approach could work?
Article Transparent functional oxide stretchable electronics: Micro-...
Hi Harikesh, you could consider using a lift off technique similar to that used when preparing TEM grids. There is a brief guide here:
https://www.emsdiasum.com/microscopy/technical/datasheet/carbon_coating.aspx
This can be done with very thin carbon films, but I am not sure how well ITO films hold together. It can be quite an art form getting the film to float free however! The electrical conductivity between the ITO and sample would be a little questionable also directly coating your sample such as with sputtering would be much easier!
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