In NVLS PECVD SEQUEL uses the RF shunt capacitor to minimize the high frequency (13.56MHz) RF on its heaterblock to remove excess noise caused by RF. However, as the tuning deviated from 100%, Vpp of the waveform (13.56Mhz) will started to shift down and shape of the waveform will start to changed at certain percentage of the tuning. As the shunt capacitor are parallel capacitors, will the tuning need to be balanced across the capacitors to get optimized tuning? How to defined if the tuning is properly done based on the waveform observed?