Hello, I'm building a ALD reactor in lab scale and I have a few questions referring to the security of operation. As known, most of ALD precursors such as TMA are pyrophoric, but how dangerous can it be, when an exhaust gas composed of small amounts of TMA diluted in nitrogen come in contact with oxigen? what is the best way to deal with exhaust gases of this kind of precursors when discharging at the atmosphere?

More Juan Sebastian Gomez Bonilla's questions See All
Similar questions and discussions