So how to choose the appropriate pressure sensor range if we need to order a new vacuum gauges? Previously the system with which I am working had sensors with the measured values of (1E-11; 1E+03) mbar at LL, (1E-11; 1E-02) mbar at Preparation Chamber and STM Chamber. However, it’s very difficult to find new gauges with the same measured pressure ranges.
So how to choose the appropriate pressure sensor range for each part of STM if we need to order a new vacuum gauges? Previously the system with which I am working had sensors with the measured values of (1E-11; 1E+03) mbar at LL, (1E-11; 1E-02) mbar at Preparation Chamber and STM Chamber. However, it’s very difficult to find new gauges with the same measured pressure ranges.
Hi Nastya,
As I see (from the vacuum ranges mentioned) you have UHV in all three chambers
(load lock, preparation and analysis chambers). For measurement in UHV the standard gauge is a hot filament ion gauge (Alpert-Bayard type): it works from 1e-4 to 1e-11 mbar. For low vacuum measurements you can use Pirany gauge (or another thermocouple gauge).
There are as well combined gauges, which includes two or three different gauges in one head.
https://www.lesker.com/newweb/pressuremeasurement.cfm
And yes, you can use used gauges with new filaments (hot filament gauge).
Regards.
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