Hi.
I know native oxide grows on Si as a function of time... in both of air and water.
Then, after BOE treatment on Si wafer, how thick can native oxide grow on it?
Is there any limited thickness of native oxide grown on Si???
Thanks.
Giuseppe Curro
You may expect a 3 nm surface SiOx layer at most (in any normal environment) due to self limiting Oxygen migration across the native layer itself agin at normal conditions of course)
1 votes
0 thanks
Dorian A H Hanaor
Naturally this depends on temperature and stress conditions. Further mechanistic details regarding the self-limiting oxidation process, which results in a particular temperature and geometry governed oxide layer thickness are presented in a study attached here.
Article Two-dimensional modeling of the self-limiting oxidation in s...
0 votes
0 thanks
- Badges
- Science topic
- Similar topics
- Organizational Psychology
- Training
More Won Bae Han's questions See All
Similar questions and discussions