Is it possible to measure the sheet resistance of CdS thin film deposited on glass by CBD (50 nm) with 4-points probe? Or the probes will damage the layer and the measured sheet resistance is wrong?
Furthe Rudiger' s suggestion, it is very difficult to use the four point probe to evaluate the sheet resistance of a semiconductor. The Hall effect measurement is the way to do it. Alternatively you could do a current-voltage of the sandwich structure of a semiconductor to analyse the sheet resistance.