Dear Jayabrata Goswami

In Silvaco TCAD (ATHENA/ATLAS/DeckBuild), you can automate parameter sweeps (like oxide thickness) with a loop construct. This way you don’t have to manually rewrite the oxide thickness for each run.

Here’s a template you can adapt for your double-gate TFET oxide thickness variation:

go atlas

# Define output log

log outf=results.log

# Sweep oxide thickness from 1 nm to 10 nm (step 1 nm)

set tox_start=1e-7 # 1 nm in cm

set tox_end=1e-6 # 10 nm in cm

set tox_step=1e-7 # 1 nm step

# Loop

set tox=$tox_start

while {$tox

Thank you so much sir for your kind response , I am trying to run this code but this type of error shows in the deck build, how I can debug this error kindly help me sir Omar H. Alzoubi

provide text , thanks

Respected Sir Omar H. Alzoubi , again I will try this code to run in the deck build, but same error shows sir, please guide me what should I do?

while is not valid inside Atlas → use Tcl foreach or for loop

Respected Sir Omar H. Alzoubi I have tired TCl foreach or for loop in the while section but the same error occur for both command

The problem is with how the loop is written. ATLAS doesn’t use plain for {} loops like in C/Tcl; instead, it uses loop ... endloop syntax.

Respected Sir Omar H. Alzoubi when I run loop and endloop instead of while section the same error occurs sir, I dont know what to do sir

Thank you so much sir Omar H. Alzoubi , I can share my email id [email protected], you may give a mail, I can share this code