NiCr and gold are sputterred onto gound PZT surface where roughness is about 0.1~0.3 mircons, NiCr film thickness is about 0.1 microns then 0.5 micorns gold. The PZTe cl ar wafers are cleaned with specific solutions before sputtering.
When I run autogrid4 it says: autogrid4: ERROR: Unknown receptor type: "Cr" -- Add parameters for it to the parameter library first! Look forward to your reply.Thank you so much!
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