How does PZT surface finish (roughness) impact on its metal sputter coating adhesion?

06 April 2023 0 8K Report

NiCr and gold are sputterred onto gound PZT surface where roughness is about 0.1~0.3 mircons, NiCr film thickness is about 0.1 microns then 0.5 micorns gold. The PZTe cl ar wafers are cleaned with specific solutions before sputtering.

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