Hi Fellows, I would like to know if there is a good way to characterize surface defects or strain. Our recent finding shows that scratched surfaces show different electrochemical properties from non-scratched surfaces. However, the scratch did not generate any SEM-level cracks/fractures (invisible in SEM). I am thinking either nano-cracks were generated on the surface or a strain field was built up. My initial thought was using TEM to look at it. However, the sample preparation may cause new strain field if a FIB method was used. Is there any way to detect such small defects (if any) or the strain field?