I am having some adhesion issues with AZ 1512HS resist on a Si substrate with 3000A oxide during an HF etch. I don't have HMDS on hand so instead I heat the substrate 150C for a few mins to break the OH bonds and immediately after cooling coat the resist to 1.5um. I expose and develop it and I have tried various hard bake temps, up to 150C for 5 mins with no luck. I was wondering if anyone had some advice? Thanks

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