Hello Everyone

I want to model a CVD process for Ti1-xAlxN in Chemkin for my Masterthesis and I modeled/found every Thermodynamic and Transport Data except the rotational relaxation collision number Zrot. Could anyone explain how to obtain this value. It would be especially helpful for the case of TiCl4, TiCl3 and AlCl3.

Thanks in advance

Michael

More Michael Wurmitzer's questions See All
Similar questions and discussions