how to fabricate micro needle 100nm range,and how to calculate photo resist thickness.
where the technology available in india
If you want such small structures, use electron beam lithography, if you have access to it. If not available, please try to get it done from IIT Bombay or IISc Bangalore.
The procedure for (cheap) silicon needles array is the pillar oxidation/etching. I remember making ~100nm diameter needles with 3.8um resolution mask on university stepper.
The process is:
1) DRIE pattern of silicon pillars
2) Oxidize to such depth what only thin central core remain non-oxidized
3) Etch away silicon dioxide.
My institute is best for MEMS go through http://www.sitar.org.in/starc/
In collaboration with KTH (Sweden) and Leti (France), Debiotech (Switzerland) developed MEMS microneedles for pain-free and precise injection of drugs:
http://www.debiotech.com/newsite/page/index.php?page=product_01&id=1&id_prod=47
The original work was completed by Prof. Göran Stemme's team (KTH). The complete machining process can easily be found in literature:
https://www.kth.se/en/ees/omskolan/organisation/avdelningar/mst/research/previous/transdermal-1.62404
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