How do I decrease the deposition of material on the quartz walls of the Chemical Vapor Deposition setup?

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Shaida Anwer Kakil

Dear Dalvi

decrease the deposition of material on the quartz walls or on any substrate .must be deceasing flow rate gas .it is important factor effect on depostion

Kranthi Kumar

It depends on precursor flow rate and deposition pressure

Lukas Alberts

there are hot-walls reactors, or cold-wall reactors in the CVD..

temperature is very important too.