How do I calculate the max. displacement of a silicon wafer with a force applied in the center?

12 October 2019 0 2K Report

It is similar to a three-point flexural test, but the wafer is round, and there are 4 supporting pins on the 4 "corners" of circle (Please refer to the attachment pictures, the first picture is the top view and the second picture is the side view of the setup). A force is applied at center of the wafer.

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