How could I make this physics section correct in Sentaurus TCAD for the physics listed in image?

Vijaya Kumar Kothandan @Vijaya-Kumar-Kothandan

08 August 2023 0 6K Report

Physics{

EffectiveIntrinsicDensity (BandGapNarrowing (OldSlotboom))

Mobility( DopingDep HighFieldSaturation Enormal )

Recombination( SRH Auger )

eBarrierTunneling "NLM" (Band2Band = Simple)

hBarrierTunneling "NLM" (Band2Band = Simple)

MLDA ( -LambdaTemp )

}

Physics (Material = "HfO2"){

BarrierTunneling "NLM"{mt = 0.29 , 0.36}

}

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