Dear All,
I have to align PDMS on LiNbO3, my channel size is 100 micron.
My process parameters are 0.3 Torr, O2 plasma treatment for 2 mins.
I put a drop of ethanol on PDMS to align on LiNbO3, I use my finger to move 2-3 times, after that heat at 80 C.
The problem is PDMS always has leakage near the inlet.
Anyone has an idea what should I do ?
Best Regards,
Yannapol S.