Dear All,

I have to align PDMS on LiNbO3, my channel size is 100 micron.

My process parameters are 0.3 Torr, O2 plasma treatment for 2 mins. 

I put a drop of ethanol on PDMS to align on LiNbO3, I use my finger to move 2-3 times, after that heat at 80 C.

The problem is PDMS always has leakage near the inlet.

Anyone has an idea what should I do ?

Best Regards,

Yannapol S.

More Yannapol Sriphutkiat's questions See All
Similar questions and discussions