Hi Sebastian, thanks a lot. Yes my system is also capacively coupled RF PECVD. I want to understand in details about the measurement of plasma parameters such as plasma density, electron temperature, EEDF etc. and their effect on coating process and final coating properties.

Usually, the ideal is to perform both diagnostics of the plasma to obtain the main plasma parameters (e.g. radicals and ion densities) and to develop some numerical model to obtain a complete description of the system. Then, of course, as you are interested by the coating itself, some surface analysis are needed to link the plasma and surface properties. All in all, it can be quite time consuming and take a lot of time and efforts! Looking at the literature for similar setups (or the same...) can be however very helpful.

good luck!