One thing we can do is Oxygen partial pressure. Any other interesting idea to increases the bandgap?
You can think about doping or using other reaction gas or gas composition.
Dear Balaji Murugan,
Please check the link below, it might answer your question
Article Effects of the Argon Pressure on the Optical Band Gap of Zin...
Gowrishankar, S., Balakrishnan, L., & Gopalakrishnan, N. (2014). Band gap engineering in Zn (1− x) CdxO and Zn (1− x) MgxO thin films by RF sputtering. Ceramics International, 40(1), 2135-2142.
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