How can I produce hollow SU8 box with Lithography?

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Emad Esmaeili

http://link.springer.com/article/10.1007%2Fs00542-004-0452-x

Yusuf Kahraman

Emad,

Thanks but your link is not related to my question. I'd like to build a structure which is shaped like a box and its' interior supposed to be empty.

Chee-Wei Lee

Can try two-photon lithography.

@Peter

It can be tried. Thanks for the advice.

George Cernigliaro

Can also try 3D projection printing. Check out work of N. Fang, currently at MIT.

Can also use SU-8 to pattern box, per usual lithographic methods, and then use a dry film SU-8 (MicroChem SU-8-3000 DFR) as lid material.