You have to pay for many software with utilities that you have mentioned but probably ImageJ and plugin TIA_reader could help you to plot your eds spectra then the next table (see link) could be useful to index the peaks.

ImageJ: https://imagej.nih.gov/ij/index.html

TIA_reader plugin: https://imagej.nih.gov/ij/plugins/tia-reader.html

Table of values: https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/X-rayDiffraction_ElementalAnalysis/HH-XRF/Misc/Periodic_Table_and_X-ray_Energies.pdf

Dear Alejandro,

thank you for your reply. However, I have no problem in obtaining chemical maps. I need to process the edx signals of each pixel. This is the why I need to convert the database in .eds files.

Probably you already checked the Oxford Instruments webpage for data export options (https://www.oxford-instruments.com/products/microanalysis/energy-dispersive-x-ray-systems-eds-edx/eds-for-tem/aztectem/data-processing-and-export), but since we don't know which software from OxfIns are you using (Aztec, Inca, ...), it will be hard to suggest some useful protocols...

Anyway, this script from HyperSpy can import Oxford data (.rpl): http://hyperspy.org/hyperspy-doc/current/user_guide/eds.html

and it comes with a rather nice manual.

Also, here are some useful hints how to access the .raw data in Aztec:

https://github.com/jrminter/tips/blob/master/AZtec/AZtec.Rmd

Thank you Janez,

I will try with the last two solutions. Just for information I used Aztec software.

Dear all,

We have just published this work on the development of Datamuncher Gamma, a new software for the analysis of SEM-EDX maps.

Regards

https://www.sciencedirect.com/science/article/pii/S0016706121006200