I'm trying to make micropatterns on acrylic to use it as a mold for PDMS. The first time I tried this, PDMS got stuck to the micropattern area of acrylic, even though I made a silanization to the acrylic before spin-coating PDMS on it. I also tried to use glass instead of acrylic, but though I had no problems with the peel-off, the method I'm using to make the pattern was fracturing the glass, so I was searching for a better and more homogeneous alternative to glass.

Any suggestion to improve the peel-off from acrylic or to use another material as a mold are very welcome! Thank you!

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