I want to measure the thickness of aluminum oxide and titanium oxide layers deposited on textured glass substates. The layer thicknesses are typically below 100nm.
Dear Dr. Radwa Algazzar ,
I suggest you to have a look at the previous, interesting question, present on RG:
- Layer thickness measurement on glass substrate?
Available at: https://www.researchgate.net/post/Layer_thickness_measurement_on_glass_substrate
Best regards, Pierluigi Traverso.
Dear Dr. Radwa Algazzar ,
I suggest you to have a look at the previous, interesting question, present on RG:
- Layer thickness measurement on glass substrate?
Available at: https://www.researchgate.net/post/Layer_thickness_measurement_on_glass_substrate
Best regards, Pierluigi Traverso.
Do you have access to XRD facilities? If yes, you can use a method called X-ray reflectivity. It is very common and works even for amorphous films.
https://en.wikipedia.org/wiki/X-ray_reflectivity
http://www.eng.uc.edu/~beaucag/Classes/Characterization/ReflectivityLab/NorthEastern%20University%20Basic%20Principles%20of%20X-ray%20Reflectivity%20in%20Thin%20Films%20-%20Felix%20Jimenez-Villacorta%20%5BCompatibility%20Mode%5D.pdf
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