I am preparing a sample for energy harvesting using electrowetting. Substrate has metal, dielectric, and hydrophobic coating in order. I am interested in characterizing the sample in terms of thickness, roughness, and dielectric constant. I am using profiler to measure the first two, but have not yet figured out how to measure the dielectric constant of the dielectric coating (Al2O3). Could some one please guide me through. Thank You
The phase change induced by a very thin layer is proportional to its dielectric constant times the optical path length at the corresponding wavelength, but for a multi layer system you will to model the whole stack and take into account measurement uncertainties in thickness, direction of incidence and the refractive index and absorption index at that wavelength.
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