The qualities mean that density, uniformity, crystallinity and so on.
I want to cheap and cheerful way.
Please tell me about the most easy way you know. I mean your know-how and experience.
It doesn't matter It is not a numerical verification.
Try XRR (reflectivity) or GIXRD (grazing incidence) yet to characterize "density, uniformity, crystallinity" of your sample in situ?
PEALD - Plasma Enhanced Atomic Layer Deposition?
https://www.researchgate.net/post/What_depths_can_one_typically_probe_with_XRR_X-ray_Reflectivity_Reflectometery
https://www.researchgate.net/post/Can_XRR_X-Ray_Reflectivity_be_implemented_in_the_Topographic_Mode_with_spatial_resolution_over_the_sample_surface_Is_there_value_for_such_analyses?_tpcectx=profile_questions
https://www.researchgate.net/post/What_is_the_best_way_to_interpret_REAL_TIME_3D_X_Y_o-2TH_o_ph_ch_reciprocal_space_relative_intensity_data_from_HRXRD_rocking_curve_analyses?_tpcectx=profile_questions
Hi Young
This material science sector is provided with a lot of high-end measurements
You have methods for film evaluation that measure a transmission with laser diffraction or other light sources, I think you can measure transmissions also in more simpler ways with a photosensitive cell, a scanner a camera or another optical standard device or simply just by comparing per eye.
You have cryogenic methods with electron microscopes that show differences in
the film microstrucuture
The micromechanic testings are technically more difficult and complex, maybe papers like that contain more practical tips:
https://www.researchgate.net/publication/267593332_Tape_Peel_Testing_as_a_Simple_Method_to_Evaluate_Interfacial_Adhesion_of_Sputtered_Thin_Layers_of_Various_Metals
Good Luck
Conference Paper Tape Peel Testing as a Simple Method to Evaluate Interfacial...
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