Hi, I'm researching about ALD process of MoO2Cl2.
While I searching about MoO2Cl2, I should verify quantitative/qualitative analysis of infinitesimal Mo oxychloride (ex, MoO2, MoO3, MoCl5, MoOCl4, and etc).
However, I think it is impossible because the concentration of Mo Oxychloride is so small.
Is there any good idea about this problem?