Hi, I'm researching about ALD process of MoO2Cl2.

While I searching about MoO2Cl2, I should verify quantitative/qualitative analysis of infinitesimal Mo oxychloride (ex, MoO2, MoO3, MoCl5, MoOCl4, and etc).

However, I think it is impossible because the concentration of Mo Oxychloride is so small.

Is there any good idea about this problem?

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