Zn is not coated to the glass/quartz substrate. I tried by PVD, but it's impossible. What can be the reason behind this and do you have any suggestions?
Hey, I suggest you to take a look at the following article where the authors seem to have made Zn film on a glass substrate. I doubt if that's the method you wished to use.
http://link.springer.com/article/10.1007/BF00714079
Hi Damla,
Could you tell me what the parameters ettings were during PVD: base pressure, sputter pressure, power level, Argon flow, electrode distance, DC or RF sputtering, etc.
Did you get no layer at all or did the Zn not adhese to the glass?
regards,
Peter
Thanks a lot Mohammad!
And Peter,
the pressure range of deposition is between 10^(-5) and 10^(-6) Torr. It is Dc sputtering. The DC is at about 70 Amper. No Argon flow. The substrate temperature is 25 C degree. I got no layer!!! No adhesion to glass/quartz!!!
Hi Damla,
If you use DC-sputtering I would expect your sputtering pressure during deposition is a least around 20-50 mT (usually with a gas like Ar) otherwise you have hardly any plasma density (and therefor no deposition). Could you describe the DC-system and process a little more so I can understand your problem better?
Peter
Hi Peter again! I see.
There are two boats at the bottom of the chamber for applying current. I put Zn powder to W boat and decrease the pressure value to nearly 10^(-6) Torr. The DC that i apply is 70 Amber, deposition rate is 0.1-0.2-0.3-0.4 Angstrom/sec.
Glass substrate is at the top. İts temperature value is at room temperature. I wate for nearly 1 hour to get a coating thickness of 50nm (supposing that i get a coating). But no coating, no layer! Our system need a special treatment to get a gas like Ar into it, but we do not have the oppurtunity to have this, so we can not use any gas during deposition. Can not I have a layer without Ar gas?
Zn and ZnO!!! I can not coat both of these to the glass or quartz slide, I nearly go mad!
I drew a scheme for telling the chamber better as an attachment to you.
Hi Damla,
Judging by your drawing, your deposition method looks more like a thermal evaporation then a plasma DC sputtering or E-gun deposition. Nevertheless, assuming you can read off the current of 70 A, do you have a temperature reading of the boats? Do you see a molten Zn layer in your boats while processing? Do you see Zn deposition on other parts of the system after the deposition? If not there most be something wrong with the electrical wiring because at 70 A you should get molten Zn in the boat and a temperature reading. Is it possible the 70A does not go through the boat but there is somehow short circuit to earth? Normally, the vapor pressure of Zn is pretty high so it should be very easy to cover glass plates with Zn, no matter what the distance, as long as the pressure is low (which it is 10-6T, should be ok). So I would start checking some essentials. Do you really have current through the boats and do you measure a temperature? If not, attach a thermocouple to the boats. If you cannot do that (no feedtrough) use temperature stickers to see if you get heating at all. Hope this advise will help you further.
kind regards,
Peter
Hi Peter,
Thanks for your detailed answer! Zn is melting! There is no problem about it, i can not read the temperature, i just know the current value. Everywhere in the chamber is being coated, except glass/quartz!!!
Very peculiar that you get Zn everywhere but not on the glass. I know Zn is very surface mobile at higher temperature and maybe Zn just doesn't want to sit/stay on the glass. Can you try using a substrate like Si or ceramic to find out if this is the case? If the metal then sticks you need to use different substrate material of pretreat the glass before deposition (roughing).
regards,
Peter
Thank you Peter, ı think i have solved the problem.
I think the distance between the substate-boat is so high. Decreasing it, it seems that i could coat Zn! tomorrow i will get the glass from the chamber! I also think for another metal as you told. Thanks for your all advices!!!
Best regards!!
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